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M.O.S.T. channel-length measurement

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2 Author(s)
Bateman, I.M. ; Queen's University of Belfast, Department of Electrical Engineering, Belfast, UK ; Magowan, J.A.

A simple and accurate method of determining the channel length of m.o.s. transistors after manufacture is presented. The technique relies on various 3-terminal capacitance measurements, from which the gate-channel capacitance and hence channel length may be obtained.

Published in:

Electronics Letters  (Volume:6 ,  Issue: 21 )