Micromachined Microwave Filters Based on Slot Type Split Ring Resonators

A micromachining technique is introduced which can be suitable for the fabrication of metamaterials. As a design example, a novel band-pass coplanar filter is designed and fabricated using slot-type (complementary) split ring resonators in the ground plane. This novel topology provides the capability of implementing metamaterials on the ground plane thus economizing the real state of microwave circuits.