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The influence of gate tunneling leakage on the circuit performances of phase locked loop (PLL) in nanoscale CMOS technology has been investigated by simulation. The basic PLL with second-order loop filter is used to simulate the impact of gate tunneling leakage on performance degradation of PLL in a standard 90-nm CMOS process. The MOS capacitors with different oxide thicknesses are used to investigate this impact to PLL. The locked time, static phase error, and jitter of second-order PLL are degraded by the gate tunneling leakage of MOS capacitor in loop filter.