Referenced Items are not available for this document.
CMOS scaling laws have already lost the physical bases, and the merest results induced by scaling laws are still utilized for requirements from technology users. In this paper, the actual situation of CMOS shrinkage and a forecast are discussed
Published in:
Advanced Thermal Processing of Semiconductors, 2006. RTP '06. 14th IEEE International Conference on
Date of Conference: 10-13 Oct. 2006
- Page(s):
- 1 - 3
- E-ISBN :
- 1-4244-0649-8
- Print ISBN:
- 1-4244-0648-X
- INSPEC Accession Number:
- 9420227
- Conference Location :
- Kyoto
- Digital Object Identifier :
- 10.1109/RTP.2006.367974
- Product Type:
- Conference Publications
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