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This paper studies one kind of new type antenna, which works at about 0.3~1.5THz.The antenna is designed by using FEM (Finite Element Method), and its structure is based on realizable MEMS (Micro-electromechanical Systems) technology. The antenna structure design depends on the physical characteristics of the material Si and the existing technics of MEMS technology. This form of antenna cell is easy to integrate. The simulation result of a 4times4 antenna array is also presented in this paper.