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Fabrication and evaluation of LiNbO/sub 3/ periodic waveguide with etched grooves

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6 Author(s)
Enokihara, A. ; Adv. Technol. Res. Labs., Matsushita Electr. Ind. Co. Ltd., Tokyo ; Suzuki, A. ; Adachi, J. ; Iwamoto, T.
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A new periodic waveguide structure with grooves etched on the surface of a proton-exchanged LiNbO3 ridge is demonstrated. The grooves were fabricated by ICP dry etching. A steep stop band of 3.2 nm width at 1.545 mum was obtained by the 355 mum-long periodic waveguide. Induced optical group delay was estimated at 4.6 ps per 1 mm waveguide length.

Published in:

Electronics Letters  (Volume:43 ,  Issue: 11 )

Date of Publication:

May 24 2007

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