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Microfabrication of Magnetic Tunnel Junctions Using CH _{3} OH Etching

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7 Author(s)
Otani, Y. ; Nat. Inst. of Adv. Ind. Sci. & Technol. ; Kubota, H. ; Fukushima, A. ; Maehara, H.
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The 100-nm-scale CoFeB/MgO/CoFeB magnetic tunnel junctions (MTJs) were fabricated using a CH3OH etching process. These MTJs have steep side walls and show clear MR loops. The distributions of magnetic properties of CH3OH etched MTJs were smaller than those of conventional Ar ion etched MTJs

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Magnetics, IEEE Transactions on  (Volume:43 ,  Issue: 6 )