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Improvement of Soft Magnetic Properties of Si/NiFe/FeCoB Thin Films at Gigahertz Band Frequency Range by Multilayer Configuration

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3 Author(s)
Hashimoto, A. ; Dept. of Phys. Electron., Tokyo Inst. of Technol. ; Nakagawa, S. ; Yamaguchi, M.

Frequency dependence of relative permeability up to 9 GHz in Si/NiFe/FeCoB thin films was measured. In 200-nm-thick FeCoB thin film, mu' reached about 70 and remained up to 3 GHz then decreased precipitously. Furthermore, mu'' indicated its resonance frequency f r at 6.4 GHz and produced prominent peak around the frequency. It was found that permeability characteristics increased loss term and lost its prompt responsivity when increasing thickness of FeCoB layer. Then a film with multilayer configuration was suggested in order to suppress the loss. The problems in multilayer configuration were solved and a multilayer film with fine soft magnetic properties was developed by insertion of Si/NiFe layers as intermediate layer. The multi-FeCoB-layer film with Si/NiFe intermediate layer indicated loss-suppressed permeability and good performance in permeablity at high frequency range

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Magnetics, IEEE Transactions on  (Volume:43 ,  Issue: 6 )