Referenced Items are not available for this document.
The use of surface acoustic waves in a scanning laser acoustic microscope for the characterization of the mechanical or acoustic properties of thin films deposited on piezoelectric substrates is demonstrated. Quantitative measurements of mass loading effects of 5000-AA-thick tungsten films deposited on lithium niobate substrates were obtained using 100-MHz surface acoustic waves. No information about the tungsten film could be obtained using 100-MHz compressional waves. Methods of generating surface waves on nonpiezoelectric materials so that this technique could be used on arbitrary substrates are discussed.<
Published in:
Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on
(Volume:35
,
Issue:
4
)
Date of Publication: July 1988
- Page(s):
- 477 - 483
- ISSN :
- 0885-3010
- INSPEC Accession Number:
- 3253969
- Digital Object Identifier :
- 10.1109/58.4185
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 06 August 2002
- Issue Date :
- July 1988
- Sponsored by :
- IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society
- PubMed ID :
- 18290177
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