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Focused-Ion-Beam Fabrication of Slanted Grating Couplers in Silicon-on-Insulator Waveguides

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4 Author(s)
Schrauwen, Jonathan ; Dept. of Inf. Technol., Ghent Univ., Gent ; Van Laere, F. ; Van Thourhout, D. ; Baets, R.

We have designed and fabricated an efficient grating coupler for coupling light between optical fibers and silicon-on-insulator waveguides. The coupler consists of 88-nm-wide slits, etched at an angle of 58deg to the surface normal. They are defined by direct etching with a focused ion beam, using iodine gas and an alumina hard mask. The measured efficiency is 46%

Published in:

Photonics Technology Letters, IEEE  (Volume:19 ,  Issue: 11 )