By Topic

High-Sensitivity Bi-Directional Flow Sensor Based on Biological Inspiration of Animal Haircell Sensors

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)
Craig Tucker ; Micro and Nanotechnology Laboratory, University of Illinois Urbana-Champaign, Urbana, IL, USA. ctucker3@uiuc.edu ; Nannan Chen ; Jonathan Engel ; Yingchen Yang
more authors

Artificial haircell (AHC) sensor is presented for highly sensitive flow-field measurements. Design considerations and MEMS process flows are given. Oscillating flow field measurements show sensitivity down to 0.6 mm/s flow rates, steady state flow fields detected down to 0.1 mm/s.

Published in:

2006 5th IEEE Conference on Sensors

Date of Conference:

22-25 Oct. 2006