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High-Sensitivity Bi-Directional Flow Sensor Based on Biological Inspiration of Animal Haircell Sensors

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6 Author(s)
Craig Tucker ; Micro and Nanotechnology Laboratory, University of Illinois Urbana-Champaign, Urbana, IL, USA. ; Nannan Chen ; Jonathan Engel ; Yingchen Yang
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Artificial haircell (AHC) sensor is presented for highly sensitive flow-field measurements. Design considerations and MEMS process flows are given. Oscillating flow field measurements show sensitivity down to 0.6 mm/s flow rates, steady state flow fields detected down to 0.1 mm/s.

Published in:

2006 5th IEEE Conference on Sensors

Date of Conference:

22-25 Oct. 2006