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This paper presents a micromachined electrostatic field sensor with U-shaped vertical thermal actuators. The sensor is fabricated with a standard surface micromachining process and the area of the sensor is less than 2.5 mm times 2.5 mm. We tested the sensor with low driving voltages of +0.6 V, and a high resolution of 200 V/m has been achieved by the sensor.
Sensors, 2006. 5th IEEE Conference on
Date of Conference: 22-25 Oct. 2006