Referenced Items are not available for this document.
This paper presents a micromachined electrostatic field sensor with U-shaped vertical thermal actuators. The sensor is fabricated with a standard surface micromachining process and the area of the sensor is less than 2.5 mm times 2.5 mm. We tested the sensor with low driving voltages of +0.6 V, and a high resolution of 200 V/m has been achieved by the sensor.
Published in:
Sensors, 2006. 5th IEEE Conference on
Date of Conference: 22-25 Oct. 2006
- Page(s):
- 1419 - 1421
- ISSN :
- 1930-0395
- E-ISBN :
- 1-4244-0376-6
- Print ISBN:
- 1-4244-0375-8
- INSPEC Accession Number:
- 9718516
- Conference Location :
- Daegu
- Digital Object Identifier :
- 10.1109/ICSENS.2007.355898
- Product Type:
- Conference Publications
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