By Topic

Single-walled carbon nanotube based gas sensor with nanoscale electrode interval using sacrificial oxide layer

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)

We developed a chemical gas sensor using SWCNT (single-walled carbon nanotubes) with nanoscale electrode-interval. To fabricate electrode pattern, we designed at first a continuous electrode pattern without any intervals. Then, the nanoscale interval was formed by a nanoscale trench using a sacrificial oxide layer located at the center of electrode. By this technique we obtained an electrode pattern with 100 nm interval. Though, the nanoscale interval can be realized by various nanolithography techniques including nanoimprint, nano-MEMS technology is not yet standardized and still requires great expense for even a stamp fabrication. Our method consisted of well developed processes for microscale semiconductor fabrication including trench formation, polysilicon deposition, and thermal oxidation. We expect that our method will induce high reproducibility and is closer to the commercialization of nanotube based gas sensor with higher sensitivity.

Published in:

Sensors, 2006. 5th IEEE Conference on

Date of Conference:

22-25 Oct. 2006