Referenced Items are not available for this document.
In this paper, we present the fabrication and the characterization of the cantilever-shaped quartz crystal resonator for high sensitive force sensing. Fabrication process employs low-temperature plasma-activated bonding of silicon to quartz wafer using N2 plasma. Fabricated resonator have thickness of 2~20 mum, fundamental resonant frequency of thickness-shear mode of 76-720 MHz. The 20-mum-thick cantilever exhibits a high quality factor of 5700.
Published in:
Sensors, 2006. 5th IEEE Conference on
Date of Conference: 22-25 Oct. 2006
- Page(s):
- 1305 - 1308
- ISSN :
- 1930-0395
- E-ISBN :
- 1-4244-0376-6
- Print ISBN:
- 1-4244-0375-8
- INSPEC Accession Number:
- 9708343
- Conference Location :
- Daegu
- Digital Object Identifier :
- 10.1109/ICSENS.2007.355869
- Product Type:
- Conference Publications
About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies
A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2013 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.
