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In2O3(001) thin films were grown on (0001) sapphire by metal-organic chemical vapor deposition. Highly textured ln2O3 films were tested as ozone sensors based on the photoreduction and oxidation effects. The sensors were found to have the largest sensitivity at room temperature. With such ln2O3 based sensors, the ozone concentrations in a wide range from 15 ppb up to 92 ppm were measured.