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Development of a Novel Flexural Plate Wave Biosensor for Immunoglobulin-E Detection by Using SAM and MEMS Technologies

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3 Author(s)
I-Yu Huang ; Nat. Sun Yat-Sen Univ., Kaohsiung ; Ming-Chih Lee ; Yi-Wen Chang

This paper presents the design, fabrication and characterization of a novel flexural plate wave (FPW) microsensor for immunoglobulin-E (IgE) detecting applications. The propagation membrane is constructed with SiO2/Si3N4/ZnO multilayers and be released from the silicon substrate as a floating thin-plate by using bulk micromachining technology. The ultrasonic flexural plate waves are launched and received by a pair of Cr/Au interdigital transducers (IDTs) on the surface of the ZnO piezoelectric thin film. In this study, we demonstrated a high C-axis orientation ZnO piezoelectric thin film deposition, an IgE self-assembly monolayer (SAM) immobilization and a FPW allergy microsensor with 21 MHz center frequency and 233 cm3/g mass sensitivity. This is the first report demonstrating human IgE detection by an FPW-based microsensor.

Published in:

Sensors, 2006. 5th IEEE Conference on

Date of Conference:

22-25 Oct. 2006