Evaluation of Monolithically Integrated Antennas and RF Transmitters for Silicon Smart Micro Sensors with Wireless-Communication Ability

This paper presents the development of monolithically integrated RF transmitters and antennas for MEMS sensors such as accelerometers. Integrating wireless-communication ability on-chip microsensor, sensors can communicate the sensing data with information network by wireless. Integration technology of MEMS sensors, and RF-CMOS including RF passive components is requited to realize highly integrated smart micro sensors. CMOS oscillators with 315 MHz carrier frequency are designed and fabricated by our CMOS/MEMS integration technology. Spiral inductors for resonators and monolithic antennas have been realized with IC metallization process. Each essential component have been fabricated and evaluated.