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This paper presents the development of monolithically integrated RF transmitters and antennas for MEMS sensors such as accelerometers. Integrating wireless-communication ability on-chip microsensor, sensors can communicate the sensing data with information network by wireless. Integration technology of MEMS sensors, and RF-CMOS including RF passive components is requited to realize highly integrated smart micro sensors. CMOS oscillators with 315 MHz carrier frequency are designed and fabricated by our CMOS/MEMS integration technology. Spiral inductors for resonators and monolithic antennas have been realized with IC metallization process. Each essential component have been fabricated and evaluated.
Sensors, 2006. 5th IEEE Conference on
Date of Conference: 22-25 Oct. 2006