Research and Design of Terahertz Horn Antenna Based on MEMS Technology

This paper studies one kind of new type antenna, which works at about 0.3 ~ 1.5THz. The antenna is designed by using finite element method (FEM), and its structure is based on realizable micro-electromechanical systems (MEMS) technology. The antenna structure design depends on the physical characteristics of the material silicon and the existing technics of MEMS technology. This form of antenna cell is easy to integrate. The simulation result of a 4×4 antenna array is also presented in this paper.