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Capacitive Humidity Sensors With High Sensitivity and Subsecond Response Times

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3 Author(s)
Steele, J.J. ; Dept. Electr. & Comput. Eng., Alberta Univ., Edmonton, Alta. ; Fitzpatrick, G.A. ; Brett, Michael J.

Capacitive-based humidity sensors were fabricated using coplanar interdigitated electrodes coated with nanostructured TiO2 thin films produced by glancing angle deposition. In this letter, we show that increased sensitivity (nF/%RH) is obtained by decreasing the electrode periodicity or by increasing the planar area of the electrodes, or both. The devices were sensitive over a wide range of relative humidity levels (<1% to >92%) and exhibited extremely fast, subsecond response times. Typical adsorption and desorption response times were measured to be <220 and >400 ms, respectively

Published in:

Sensors Journal, IEEE  (Volume:7 ,  Issue: 6 )

Date of Publication:

June 2007

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