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Studies on MEMS Vacuum Sensor Based on Field Emission of Silicon Tips Array

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4 Author(s)
Weiren Wen ; Dept. of Mech. Electronical Eng., Xiamen Univ. ; Lingyun Wang ; Junchuan Gao ; Daoheng Sun

In this paper, we present our recent works on the fabrication and testing of a novel MEMS (micro electro mechanical systems) vacuum sensor based on field emission of silicon tips array. The prototype vacuum sensor had been fabricated and tested under some conditions. It worked as a diode, having the voltage as the input and field emission current as output, with threshold voltage of approximate 7V and breakdown voltage of about 265V. When the pressure fell from 0.037Pa to 0.0077Pa, the field emission current increased from 80.3muA to 96.3muA. This work suggests a potential application of field emission to vacuum sensor.

Published in:
Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on

Date of Conference: 16-19 Jan. 2007

Page(s):
199 - 202
Print ISBN:
1-4244-0610-2
INSPEC Accession Number:
9573568
Conference Location :
Bangkok
Digital Object Identifier :
10.1109/NEMS.2007.352261
Product Type:
Conference Publications

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