By Topic

Micro Fluidic System by Integrating Pressure Sensor Arrays with a Micro-Channel

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
H. S. Ko ; Institute of Aeronautics and Astronautics, National Cheng Kung University, Tainan, Taiwan 70101 ROC ; C. W. Liu ; C. G. Liu ; C. Gau

This fabrication process developed in the current paper is almost the reverse of the surface micromachining process usually used for the microchannel system. This allows the use of SU-8 to fabricate, by lithography, the diaphragm and the cavities used for these pressure sensors, and the channel. The fabrication process has many advantages over others, such as completely absence of diaphragm stiction, allowing much wider measurement range and flow conditions. More detailed design and fabrication techniques developed, and the calibration of sensors for this channel system is presented. The pressure distributions measured along the channel are compared with the analysis.

Published in:

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Date of Conference:

16-19 Jan. 2007