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A single crystalline silicon microtoroidal resonator with integrated MEMS-actuated tunable optical coupler is demonstrated for the first time. It is fabricated by combining hydrogen annealing and wafer bonding processes. The device operates in all three coupling regimes: under-, critical, and over-coupling. We have also developed a comprehensive model based on time-domain coupling theory. The experimental and theoretical results agree very well. The quality factor (Q) is extracted by fitting the experimental curve with the model. The unloaded Q is as high as 110 000, and the loaded Q is continuously tunable from 110 000 to 5400. The extinction ratio of the transmittance is 22.4 dB. This device can be used as a building block of resonator-based reconfigurable photonic integrated circuits
Published in:
Selected Topics in Quantum Electronics, IEEE Journal of
(Volume:13
,
Issue:
2
)
Date of Publication: March-april 2007
- Page(s):
- 202 - 208
- ISSN :
- 1077-260X
- INSPEC Accession Number:
- 9410325
- Digital Object Identifier :
- 10.1109/JSTQE.2007.893743
- Date of Current Version :
- 23 April 2007
- Issue Date :
- March-april 2007
- Sponsored by :
- IEEE Photonics Society
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