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Design and Characterization of MEMS Micromirrors for Ion-Trap Quantum Computation

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4 Author(s)
Changsoon Kim ; Dept. of Electr. & Comput. Eng., Duke Univ., Durham, NC ; Caleb Knoernschild ; Bin Liu ; Jungsang Kim

To build a large-scale quantum information processor (QIP) based on trapped ions or neutral atoms, integrated optical systems capable of delivering laser beams to multiple target locations are necessary. We consider a beam-shifting element consisting of a tilting micromirror located at the focal point of a lens, as a fundamental building block for such a system. We explore the design space of the micromirrors and characterize their dc, frequency, and transient responses. The fastest mirror features the resonant frequency of 113 kHz and the 98% settling time of 11 mus. The design tradeoffs are discussed to facilitate further optimization of the mirror performance for this application

Published in:

IEEE Journal of Selected Topics in Quantum Electronics  (Volume:13 ,  Issue: 2 )