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Robotic Assembly System in Semiconductor Industry

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7 Author(s)
Cibej, Ivan ; Faculty of Electrical Engineering, Edvard Kardelj University, Ljubljana, Yugoslavia. ; Solar, Borut ; Bajd, Tadej ; Rudel, Drago
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A sensor-based robotic production system for assembly of rectifier bridges is described. Assembly tasks in semiconductor industry require a robot with good positional accuracy having the capability of high velocities and accelerations in all degrees of freedom. An important part of the semiconductor production is to measure the diode properties. The trajectory of the manipulator end-effector is determined by the results from these measurements. A vaccum gripper with an air flow sensor is also used in this particular task. The robotic language DARL was used to control the assembly process.

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Industrial Electronics, IEEE Transactions on  (Volume:IE-34 ,  Issue: 4 )