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Behavioral Modeling of RF-MEMS Disk Resonator

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3 Author(s)
Khalid El-Shafie, M. ; Dept. of Electron. & Comm., Ain Shams Univ., Cairo ; Sakr, M.M. ; Ragai, H.F.

This paper presents behavioral modeling of RF-MEMS disk resonator through driving its equivalent circuit model. The model is operating in the first two radial contour modes and the results were verified with ANSYS. A Pierce oscillator utilizing the resonator model is designed to demonstrate the performance of the model on the oscillator. The oscillator performance like frequency and phase noise is presented

Published in:

MEMS, NANO and Smart Systems, The 2006 International Conference on

Date of Conference:

Dec. 2006