By Topic

Behavioral Modeling of RF-MEMS Disk Resonator

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Mousa Khalid El-Shafie ; IEEE Ain Shams University, Electronics & Comm. Department, Cairo, Egypt. ; Mostafa M. Sakr ; Hany Fikry Ragai

This paper presents behavioral modeling of RF-MEMS disk resonator through driving its equivalent circuit model. The model is operating in the first two radial contour modes and the results were verified with ANSYS. A Pierce oscillator utilizing the resonator model is designed to demonstrate the performance of the model on the oscillator. The oscillator performance like frequency and phase noise is presented

Published in:

2006 International Conference on MEMS, NANO, and Smart Systems

Date of Conference:

Dec. 2006