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Active Charge/Discharge IGBT Modulator for Marx Generator and Plasma Applications

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2 Author(s)
Steenkamp, C.J.T. ; Phys. & Eng. Phys. Dept., Saskatchewan Univ., Saskatoon, Sask. ; Bradley, Michael P.

In this paper, we present a Marx-stackable insulated-gate-bipolar-transistors-based modulator for plasma ion implantation and other pulsed high voltage-high peak power applications. Active control of charging and discharging cycles permits rigid pulse forms, arbitrary duty cycles and internal efficiencies exceeding 90%. We demonstrate a 20-kV 15-A generator using a 2-kV Marx generator to drive a pulse transformer

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Plasma Science, IEEE Transactions on  (Volume:35 ,  Issue: 2 )