Active Charge/Discharge IGBT Modulator for Marx Generator and Plasma Applications

In this paper, we present a Marx-stackable insulated-gate-bipolar-transistors-based modulator for plasma ion implantation and other pulsed high voltage-high peak power applications. Active control of charging and discharging cycles permits rigid pulse forms, arbitrary duty cycles and internal efficiencies exceeding 90%. We demonstrate a 20-kV 15-A generator using a 2-kV Marx generator to drive a pulse transformer