Referenced Items are not available for this document.
In this paper, we present a Marx-stackable insulated-gate-bipolar-transistors-based modulator for plasma ion implantation and other pulsed high voltage-high peak power applications. Active control of charging and discharging cycles permits rigid pulse forms, arbitrary duty cycles and internal efficiencies exceeding 90%. We demonstrate a 20-kV 15-A generator using a 2-kV Marx generator to drive a pulse transformer
Published in:
Plasma Science, IEEE Transactions on
(Volume:35
,
Issue:
2
)
Date of Publication: April 2007
- Page(s):
- 473 - 478
- ISSN :
- 0093-3813
- INSPEC Accession Number:
- 9412819
- Digital Object Identifier :
- 10.1109/TPS.2007.892739
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 16 April 2007
- Issue Date :
- April 2007
- Sponsored by :
- IEEE Nuclear and Plasma Sciences Society
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