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Promising a-Si:H TFTs with High Mechanical Reliability for Flexible Display

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8 Author(s)
M. H. Lee ; Display Technology Center, Industrial Technology Research Institute (DTC/ITRI), Hsinchu, Taiwan; Institute of Electro-Optical Science and Technology, National Taiwan Normal University, Taipei, Taiwan. E-mail: ; K. -Y. Ho ; P. -C. Chen ; C. -C. Cheng
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The high mechanical reliability of a-Si:H TFTs have been fabricated on plastic substrate for flexible display applications. The promising TFT backplane has been successfully applied for AMLCD on colorless polyimide (PI) substrate. The tri-layer of Ti/Al/Ti with 10 mum width are used as scan lines and data lines to replace Cr for stress compensation, and can sustain mechanical bending cycles. The TFTs at 200degC on PI substrate have superior stability with external strain and bending cycles. The redistribution of trap states is analyzed by modeling simulation. The promising a-Si:H TFTs on PI substrate after bending cycles still have superior operation and electrical stress stability and make it possible for AMOLED applications. The Si-based TFTs with high mechanical reliability are highly potential candidate for flexible active-matrix display beyond FPD (flat panel display) generation

Published in:

2006 International Electron Devices Meeting

Date of Conference:

11-13 Dec. 2006