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DFM, DFY, Debug and Diagnosis: The Loop to Ensure Yield

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1 Author(s)

Semiconductor yield has traditionally been limited by random particle-defect based issues.However, as the feature sizes reduced to 0.13 micron and below, systematic mechanism-limited yield loss began to appear as a substantial component in yield loss. In addition, it is becoming clear that ramping yield would take longer and final yields would not reach historical norms.

Published in:

Quality Electronic Design, 2007. ISQED '07. 8th International Symposium on

Date of Conference:

March 2007