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Rib waveguides with different slab thickness were fabricated using photopatternable organic-inorganic hybrid materials through multi-step spin coating and photolithography. A single mode circular waveguide at 1550 nm was designed and fabricated using the equivalent refractive index method. Waveguide thermal stability and thermo-optic coefficient were investigated using thermogravimetric analysis (TGA) and spectroscopic ellipsometry, respectively. Results suggest that the single mode waveguide can be used to develop thermal optical devices such as thermo-optic switches.