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A Hybrid Micromachined High -Q Cavity Resonator at 5.8 GHz

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3 Author(s)
Tavernier, Christophe A. ; Dept. of Electrical and Computer Engineering, The University of Arizona, Tucson, AZ 85721 ; Henderson, Rashaunda ; Papapolymerou, J.

A novel hybrid micromachined resonator with high quality factor and small size at 5.8GHz is presented. The design of the resonator is based on a micromachined cavity filled with a high dielectric constant material. Energy is coupled into the cavity from input and output microstrip lines via slots. It is shown experimentally that the limiting factor in achieving a higher Q with the given dielectric materials is the dielectric loss. This resonator provides a low cost, minimum size and compact solution for the fabrication of planar, narrow-band filters and diplexers in modern wireless communication systems.

Published in:

Microwave Conference, 2000. 30th European

Date of Conference:

Oct. 2000