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A hologram is a planar, transmission type of collimating component. Performance of a submillimeter wave hologram type of compact antenna test range (CATR) is studied with a combined analysis of a physical optics (PO) and a finite difference time domain (FDTD) method at 500 GHz. Main focus is on the fabrication errors, the feed positioning errors, and the frequency and polarization dependence of the hologram structure. The effect of planarity errors is discussed.