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For the first time, distributions of microwave signals in an MMIC are measured by electro-optic field mapping techniques and compared with results of microwave CAD. In good agreement, the results show clear variations of the potential inside the MMIC. Moreover, the electro-optic measurement results reveal a pronounced nonlinear behaviour, of the circuit under saturation conditions. Thus, the combination of measurement and simulation provides the possibility of a circuit-intemal performance analysis of an MMIC. The results can be used as a basis for improvements of the design layout.