Photonic Crystal Microcavities in SOI Photonic Wires for WDM Filter Applications

We report on the design, fabrication, and optical characterization of silicon-on-insulator-based one-dimensional (1-D) photonic crystal (PhC) microcavities. The scope of this paper lies on filters for communication systems around 1.55-mum wavelength. Detailed calculations of filter performance against the relevant device layout parameters are given. Resonant cavity modes with quality factors as high as Qap630 in the 1.55- mum wavelength band were measured for filters comprised of two PhC mirrors containing 2 times 5 holes, that were 200 nm in diameter. This is the highest Q-value reported of such a filter up to now