Various sensing characteristic of carbon nanotube synthesized by low press chemical vapor deposit (LPCVD) method have been studied. The composite sensing film of silicon dioxide and multi-wall nanotubes (SiO 2-MWNTs) is sensitive to methane. The various characteristic such as sensitivity, repeatability, reliability and cross-sensitivity of SiO2-MWNTs composite film gas sensor have been studied. Having been tested in methane 3 times, the sensor keeps the sensitivity steady, which means the sensor has a good repeatability. In concentration recognizing, the temperature is an interfering factor and always leads to error result. It is eliminated using neural network (NN) recognized system
Published in:
Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on
Date of Conference: 18-21 Jan. 2006