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Batch Fabrication of Self-assembled Nickel-Iron Nanowires by Electrodeposition

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3 Author(s)
Sardan, O. ; Coll. of Eng., Koc Univ., Istanbul ; Yalcinkaya, A.D. ; Alaca, B.E.

Lack of batch-compatible fabrication techniques can be considered as the most important challenge in the integration of nanostructures with microelectromechanical systems (MEMS). A solution to the micro-nano integration problem is offered by introducing a batch-compatible nanowire fabrication technique based on basic lithographic techniques and guided self-assembly. The basic principle is obtaining cracks at predetermined locations in a sacrificial SiO2 layer on Si and filling these cracks with a suitable metal by electrodeposition. The technique is demonstrated by using nickel-iron as the deposition material and verifying the magnetic behavior of resulting nanowires

Published in:

Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on

Date of Conference:

18-21 Jan. 2006