Application of MEMS Technology to Micro Direct Methanol Fuel Cell

In view of micro fuel cells, the silicon processes are employed for microfabrication of the micro direct methanol fuel cell (μDMFC). Using the MEMS technology we have successfully made single μDMFC as small as 8mm×8mm×3mm. The main reason for the use of MEMS processes is the prospective potential for miniaturization and economical mass production of small fuel cells. The double side deep wet etching for the gas channel and fuel chamber preparation and the formation of porous silicon (PS) layers for electrode supports by electrochemical process are the key technologies to improve the MEMS-based μDMFC. Moreover, for the first time, the fabrication of electro-catalytic electrodes using electroless plating platinum and ruthenium (Pt-Ru) co-deposition method over porous silicon (PS) substrates is introduced. Then the electro-catalytic electrode was characterized using scanning electron microscope (SEM) and energy dispersive X-ray spectrometer (EDX). Using the MEMS technology makes the batch fabrication of μDMFCs much easier and reduces the usage of rare metals.