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Design of an Electrostatic Repulsive-Force Based Vertical Micro Actuator

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3 Author(s)
Qiao, D.Y. ; M/NEMS Lab., Northwestern Polytech. Univ., Xi''an ; Yuan, W.Z. ; Li, X.Y.

Micro actuators using electrostatic repulsive-force induced by asymmetric electric field has no problem of pull-in instability existing in electrostatic attractive-force based micro actuators, and their stroke is not limited by the initial gap between electrodes. In this paper, an improved structure of micro actuator based on electrostatic repulsive-force is presented to achieve a large vertical stroke without penalties of large actuation voltage and additional insulation layer. Numerical simulations are performed to investigate the relationship between the repulsive-force and the structural parameters. Simulation results show that the repulsive-force is highly dependent on finger width, finger distance and finger thickness rather than initial gap between movable and fixed fingers. Numerical simulation predicts that the repulsive-force based vertical micro actuator can achieve a stroke of 4 mum at a driving voltage of 78 V

Published in:

Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on

Date of Conference:

18-21 Jan. 2006

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