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Low Temperature Growth of Carbon Nanotubes by Alcohol Catalytic CVD for Field Emitter Applications

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4 Author(s)
Sato, H. ; Graduate Sch. of Eng., Mie Univ., Tsu ; Hata, K. ; Hiasa, Ken ; Saito, Y.

The growth characteristics, such as temperature and pressure dependence, of carbon nanotubes (CNTs) by alcohol catalytic CVD (ACCVD) were studied. The thickness of the CNT layer is examined using scanning electron microscopy It was confirmed that the growth temperature could be lowered to as low as 400degC. This result indicates that the ACCVD technique is suitable for the low temperature CNT-FEA fabrication

Published in:

Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International

Date of Conference:

July 2006

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