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Atom Probe Characterization of Magnetic and Semiconductor Device Structures

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2 Author(s)
Larson, D.J. ; Imago Sci. Instrum. Corp., Madison, WI ; Thompson, K.

The application of atom probe analysis to a variety of material systems in semiconductor and magnetic recording industries is discussed. Discussion includes SiGe layered structures, transistor-based structures,magnetoresistive spin valves, tunnel junctions, current-confined path spin valve structures and perpendicular recording media

Published in:

Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International

Date of Conference:

July 2006