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Formation of sharp-apex pyramids for active tips used in scanning probe microscopy

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6 Author(s)
J. Soltys ; Institute of Electrical Engineering, Slovak Academy of Sciences, Bratislava, Slovakia. e-mail: ; D. Gregusova ; R. Kudela ; A. Satka
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This work is a part of a deeper study into technologies developed for the so-called active tips for use in scanning probe microscopy. This paper show that using an AlAs facet-forming sacrificial layer and a H 3PO4, H2O2, H2O based solution, symmetric pyramidal structures with tip diameter below 35 nm can be prepared. Such pyramidal objects was used for further MOCVD overgrowth. Finally, the quality of the mesa sidewalls obtained was controlled using the SEM and AFM. The pyramids are suitable for the next processing, and various semiconductor devices can be prepared on the pyramid

Published in:

2006 International Conference on Advanced Semiconductor Devices and Microsystems

Date of Conference:

Oct. 2006