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Photoluminescence and electrical characterization of transparent Eu and Pd-doped TiO2 thin films

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3 Author(s)
Domaradzki, J. ; Fac. of Microsyst. Electron. & Photonics, Wroclaw Univ. of Technol. ; Borkowska, A. ; Kaczmarek, D.

In this work, optical and electrical characterization of transparent Eu and Pd-doped TiO2 thin films have been presented. Thin films were deposited by low pressure hot target reactive magnetron sputtering form metallic Ti-Pd-Eu mosaic target on silicon. It has been shown that incorporation of Pd and Eu dopants into TiO2 matrix could modify its properties to obtain electrically and optically active oxide-semiconductor with the electron-type (n) of electrical conduction at room temperature. Pd dopant changes the electrical properties of TiO2 from dielectric oxide to conducting oxide. Eu dopant results in enhanced optical activity of Pd-doped TiO2 thin films in ultraviolet range

Published in:

Advanced Semiconductor Devices and Microsystems, 2006. ASDAM '06. International Conference on

Date of Conference:

Oct. 2006