The plasma emission and absorption coefficients were measured by means of two different techniques using an optical fiber probe in a parallel-plate RF glow discharges. The first technique can, in principle, provide three-dimensional resolution with the movement of the probe, while the second technique provides only a line-average measurement. The results of two different measurement methods and the practical limitations of the techniques are discussed
Published in:
Plasma Science, IEEE Transactions on
(Volume:17
,
Issue:
6
)
Date of Publication: Dec 1989