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Spatially resolved plasma emission and absorption coefficient measurements by an optical fiber probe

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2 Author(s)
Jin, Zhong‐Jun ; Dept. of Electr. & Comput. Eng., Northeastern Univ., Boston, MA, USA ; Chan, Chung

The plasma emission and absorption coefficients were measured by means of two different techniques using an optical fiber probe in a parallel-plate RF glow discharges. The first technique can, in principle, provide three-dimensional resolution with the movement of the probe, while the second technique provides only a line-average measurement. The results of two different measurement methods and the practical limitations of the techniques are discussed

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Plasma Science, IEEE Transactions on  (Volume:17 ,  Issue: 6 )