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On-chip Digitally Tunable High Voltage Generator for Electrostatic Control of Micromechanical Devices

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3 Author(s)
Aaltonen, L. ; Electron. Circuit Design Lab., Helsinki Univ. of Technol. ; Saukoski, M. ; Halonen, K.

Micromechanical structures with capacitive readout provide a feasible alternative for feedback by utilizing electrostatic forces without any requirement for additional electrodes. For this purpose high voltages are often required. This paper presents circuit structures for on-chip high voltage generation. A high voltage amplifier with digitally controllable output or a high voltage DAC is implemented and, as an example application, the DAC is used for quadrature compensation of a microelectro-mechanical gyroscope. The implemented high voltage generator achieves output voltages between zero and 27 V in 29 mV steps. The charge pump output voltage is limited in all cases to prevent reliability problems

Published in:

Custom Integrated Circuits Conference, 2006. CICC '06. IEEE

Date of Conference:

10-13 Sept. 2006