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Improved Carrier Injection in Ultrathin-Body SOI Schottky-Barrier MOSFETs

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4 Author(s)
Zhang, M. ; Forschungszentrum Julich GmbH ; Knoch, J. ; Appenzeller, J. ; Mantl, S.

The impact of the gate oxide and the silicon-on-insulator (SOI) body thickness on the electrical performance of SOI Schottky-barrier (SB) MOSFETs with fully nickel silicided source and drain contacts is experimentally investigated. The subthreshold swing S is extracted from the experimental data and serves as a measure for the carrier injection through the SBs. It is shown that decreasing the gate oxide and body thickness allows to strongly increase the carrier injection and hence, a significantly improved on-state of SB-MOSFETs can be obtained

Published in:

Electron Device Letters, IEEE  (Volume:28 ,  Issue: 3 )