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High-Temperature Leakage Improvement in Metal–Insulator–Metal Capacitors by Work–Function Tuning

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7 Author(s)
Chiang, K.C. ; Dept. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu ; Cheng, C.H. ; Pan, H.C. ; Hsiao, C.N.
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Using low-cost and high work-function Ni, a low leakage current of 5times10-6 A/cm2 at 125 degC is obtained in a high 25-fF/mum2-density SrTiO3 metal-insulator-metal (MIM) capacitor processed at 400 degC. This is approximately two orders of magnitude better than the same device using a TaN electrode, with added advantages of improved voltage and temperature coefficients of capacitance. This work-function tuning method also has merit for achieving both low thermal leakage and high overall kappa value beyond previous laminate structure

Published in:

Electron Device Letters, IEEE  (Volume:28 ,  Issue: 3 )