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Precise Oscillation Loop for a Resonant Type MEMS Inertial Sensors

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3 Author(s)
Chul Hyun ; Sch. of Electr. Eng. & Comput. Sci., Seoul Nat. Univ. ; Jang Gyu Lee ; Taesam Kang

This paper presents an oscillation loop for an INS (inertial navigation system) grade, surface micro-machined differential resonant accelerometer and in-plane vibratory gyroscope. This resonant type sensor utilizes the electrostatic stiffness changing effect of an electrostatic actuator. A closed loop system called self-sustained oscillation loop is prerequisite for its operation as a resonant accelerometer. And precision driving mode oscillation is important to the vibratory gyroscope. A self-sustained oscillation loop induces the system's dynamic states into its primary mode, thus keeps track of its resonant state under applied acceleration or perturbation. For this, a simple self-sustained oscillation loop is designed and the feature of the loop is analyzed in the viewpoint of a nonlinear dynamic system. For the efficient and stable self-sustained oscillation loop, we obtained the proper slope of the nonlinear and phase shifting coefficient from the analytical results. Finally, the simulation and experimental results for a resonant type accelerometer and vibratory gyroscope are given

Published in:

SICE-ICASE, 2006. International Joint Conference

Date of Conference:

18-21 Oct. 2006