By Topic

Proposal of Distributed Architecture for Micromirror Image Generation in Maskless Optolithography System

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Jaeman Choi ; Inst. of Adv. Mechatronics for Thinfilm Eng. Needs, Busan ; Younghun Jin ; Haeryung Kim ; Manseung Seo

Recent maskless lithography technologies using MEMS devices provide the attractive advantage of low cost manufacturing such as one for semiconductors. However, in order to utilize maskless lithography technology into large flat panel display manufacturing, the difficulties that arise in the generation and transmission of huge micromirror image data should be overcome. We aim to develop a strategy for real time data generation and transmission by distributing the huge image data being individually processed on multiple computers. Entire image data generation processes relevant to maskless lithography are analyzed upon the unit micromirror. As a result, the distributed architecture capable of image data generation and transmission is devised. Communications and controls between the distributed systems are performed upon the client-sever model. For the verification of the proposed architecture, lithography experiments fabricating actual patterns on wafers are carried out with a set of two image data individually generated on two different computers upon the distributed architecture. The boundary created by two interfacing micromirrors is matched exactly. The accuracy of the system upon the proposed architecture is ensured through the actual FPD fabrication

Published in:

SICE-ICASE, 2006. International Joint Conference

Date of Conference:

18-21 Oct. 2006