Fabrication and Characterization of Benzocyclobutene Optical Waveguides by UV Pulsed-Laser Illumination

Buried-type benzocyclobutene (BCB) optical waveguides fabricated by UV pulsed-laser illumination are proposed and comprehensively characterized in this paper. The fabrication process is greatly simplified as compared to conventional dry-etched ridge-type BCB waveguides. The measured propagation loss at 1548 nm is as low as 0.6 dB/cm due to the buried waveguide structure. And the produced refractive index change is dependent upon the number of laser shots such that single-mode waveguides with different mode sizes can be tailored for efficient coupling. Furthermore, rigorous analyses of surface damage threshold, rms roughness, and chemical characteristics under different illumination conditions are presented to illustrate the design considerations and the chemical mechanism of the UV-induced BCB waveguides